Washing/Drying 

【Types】

Washing Apparatus for Tool（Acid/Organic）/Resist Stripper (Acid/Organic/Monoethernolamine ）/Lift-off Washing Apparatus/Etching Apparatus/Developing Apparatus/Ultasonic Washing Apparatus etc. 

Resist Strip with Monoethenolamine is our recommendation. It's safe, inexpensive, and no need to worry about fire protection law. The Details 

【Operation and Structure】

Remove the resist by organic stripping liquid→ rinse liquid → pure water clean → spin dry

Circulation, etching, stripping system

Materials: SUS,PVC, PP

Temperature control, automatic liquid medicine adjustment, ph control system are programmed 

【About】

Cleans a single mask to multiple masks with an automatic handling system

(1) Heated-sulfuric Acid Tank: Dip-processing in the tank set at 80℃

(2) DIP Water-washing Tank 1: The 1^st water-washing with the overflow system

(3) DIP Water-washing Tank 2: The final water-washing with the overflow system

(4) Spin-drying: Spin dry the work by unit or by a cassette 

【About】

Liquids to clean with: Hydro fluoric acid, nitric acid, hyperhydration, and other solutions

Other: Vertical elongated versions of this cleaning apparatus can be made to compensate for different types of bell jar, etc.

Automatic liquid medicine supplying systemas are programmed 

【Applicable works】

・Quartz Furnace Core Pipe φ130-φ450 applicable to various types

・Other Quartz parts, other quartz tools

【Operation/Structure】

・Both loader and unloader have 2 sets of cassette

・Applicable to mask wafer, and can coat, at most, with 2 kinds of liquid 

・Automatic collecting system for emergencyhalts on equipment  

・Direct servomotor allows for high speed spins

・Spin etcher 

【About】

We offer different types depending on your needs in size and use.

Please contact us for inquiries.

【Characteristic】

The equipment can be used to process a large range of devices such as a laboratory device to a C-to-c mass producing equipment.

・Simple structure allows processing from a single wafer. 

・Because of our eccentric mechanism (Patented technology)

1. We can manufacture the equipment at a low-cost.
2. Cleaning the back side of the work is made easier.

【Operation】

・Nozzle sprays on circulating wafer

・Spray processing development → water clean → spin dry

【About】

Cleans dirty cups immidiately and safely. Cleaning with ethylene carbonate, we made sure its easy and safe for the operators and better for the environment.

【About】

Simply place the object in the transparent cleaning room made by PVC, adjust the nozzle. The cleaning boat will move horizontally and it will clean the object.  

【Application Example】

We recommend this to those who use a manual washer to switch it with our product which does everything with only one press of a button! The sealing structure makes it possible to wash anything without the mess.

【About】

Lift Dry, with a high heat and surface tension, can dry those works that are fragile or have holes and ditches cleanly and completely. 

【Applicatin example】

This will make a great replacement if you are drying with acetone or IPA. Lift Dry does not require medicine or motive power, so it is very safe and does not generate by products. 

【About】

The doors slide to the back and allow more room on the top. We have successfully introduced it as a plating holde

【Application Example】

Applicable to 8" cassettes of semi- conductor, glass boards, etc. 

【About】

Rotation frequency is 3,000rpm at maximum

Chuck type, mechanical chuck type, vacuum chuck type

Ceramic boards, glass boards, (up to 9")